作者yellowfishie (喵喵喵喵~~~)
看板NTUGIEE_EDA
標題[研究] double patterning/exposure
時間Mon Apr 21 08:38:16 2008
For double patterning/exposure,
wiki 的網頁有更新:
http://en.wikipedia.org/wiki/Double_patterning
There are several types of
double patterning. The four most common types are:
double exposure,
spacer mask,
heterogeneous mask, and
intermediate pattern
accumulation.
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※ 編輯: yellowfishie 來自: 140.112.48.60 (04/21 09:00)