作者yellowfishie (喵喵喵喵~~~)
看板NTUGIEE_EDA
标题[研究] double patterning/exposure
时间Mon Apr 21 08:38:16 2008
For double patterning/exposure,
wiki 的网页有更新:
http://en.wikipedia.org/wiki/Double_patterning
There are several types of
double patterning. The four most common types are:
double exposure,
spacer mask,
heterogeneous mask, and
intermediate pattern
accumulation.
--
◣ ◢
..
◥S
--
※ 发信站: 批踢踢实业坊(ptt.cc)
◆ From: 140.112.48.60
※ 编辑: yellowfishie 来自: 140.112.48.60 (04/21 09:00)