作者Bionut (生物堅果)
看板NTU-Exam
標題[試題] 101上 林恭如 光電儀測
時間Sat Dec 29 22:48:59 2012
課程名稱︰光電儀測
課程性質︰選修
課程教師︰林恭如
開課學院：電資
開課系所︰光電所
考試日期（年月日）︰11/06/12
考試時限（分鐘）：180 min
是否需發放獎勵金：y
（如未明確表示，則不予發放）
試題 :
1. Composition anaylsis of a sample,
(1) two method to analysis...(10%)
(2) if Z>40, method? (5%)
(3) how to do depth profiling? how to increase the resolution?
(10%)
(4) if want to find dopant concentration? two method? (10%)
(5) two-dimensional surface topology, and dopant uniform.
(6) the lateral, depth resolution of the method above.
2. Mary want to do some calculation before SEM diagnosis of her sample
(50% total)
(a) wave length of electron @ kinetic energy ~20keV
(b) Maximum depth of penetration into Si (ro=2.33g/cm^3)
(c) Resolution of SEM under Rayleigh criterion with NA=0.01
(d) The surface Au film thickness needed to prevent x-ray
generation from Si-substrate for electron energy @ 20keV
(e) induced carrier density, with I=1nA, t=1us, kinectic energy@20keV
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