时间：97年11月12日（三）13：30～15：20 地点：交通大学光复校区工程五馆 B1 国际会议厅 主讲者：Dr. Ming C. Wu (吴明强博士), Co-Director of BSAC, UC Berkeley 讲题：Optical MEMS and Silicon Photonics 摘要： The telecom boom in the late 1990s and early 2000s has accelerated the maturation of the optical MEMS technology. A wide range of optical MEMS components were taken from laboratories to reliable products. In this talk, I will review the current state of the art of the MEMS devices and subsystems for telecom and data-com applications. Devices for display application will also be discussed. Silicon photonics is a new emerging area that leverages the immense capability of established CMOS foundries to make nanophotonic integrated circuits. High speed modulators and detectors have been demonstrated. Adding MEMS to Si Photonics opens up many new opportunities. Tunable and reconfigurable devices can be realized. I will MEMS-based tunable Si microdisk resonators developed at UC Berkeley. Variable bandwidth filters and reconfigurable optical add-drop multiplexers have been demonstrated. Finally, I will talk about the integrated semiconductor lasers on Si, a critical but missing component of Si Photonics. We used optoelectronic tweezers to assemble pre-fabricated InGaAsP microdisk lasers (5um diameter, 200nm thickness) directly on silicon waveguides on SOI platform. Sub-mW threshold has been achieved. 吴明强博士简历： Ming C. Wu is Professor of Electrical Engineering and Computer Sciences, and Co-Director of Berkeley Sensor and Actuator Center (BSAC) at the University of California, Berkeley. He is also Chief Scientist of CITRIS, and Director of Berkeley Microfabrication Laboratory. Dr. Wu received his B.S. degree in Electrical Engineering from National Taiwan University, and M.S. and Ph.D. degrees in Electrical Engineering and Computer Sciences from the University of California, Berkeley in 1985 and 1988, respectively. From 1988 to 1992, he was a Member of Technical Staff at AT&T Bell Laboratories, Murray Hill, New Jersey. From 1992 to 2004, he was a professor in the Electrical Engineering department at the University of California, Los Angeles (UCLA). He has been a faculty member at Berkeley since 2004. His research interests include MEMS (micro-electro-mechanical systems), MOEMS, semiconductor optoelectronics, nanophotonics, and biophotonics. He has published 7 book chapters, over 155 journal papers and 300 conference papers. He is the holder of 19 U.S. patents. Prof. Wu is a Fellow of IEEE, and a member of Optical Society of America. He was a Packard Foundation Fellow from 1992 to 1997. He received the 2007 Paul F. Forman Engineering Excellence Award from Optical Society of America. --

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